Global optimization of an encapsulated Si/SiO2 L3 cavity with a 43 million quality factor

We optimize a silica-encapsulated silicon L3 photonic crystal cavity for ultra-high quality factor by means of a global optimization strategy, where the closest holes surrounding the cavity are varied to minimize out-of-plane losses. We find an optimal value of Q c = 4.33 × 10 7 , which is predicted...

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Bibliographic Details
Published in:Scientific reports 2021-05, Vol.11 (1)
Main Authors: Vasco, J. P., Savona, V.
Format: Article
Language:English
Subjects:
639/624/399/1022
639/624/399/1098
Algorithms
Fabrication
Humanities and Social Sciences
multidisciplinary
Optimization
Science
Science (multidisciplinary)
Silica
Silicon
Silicon dioxide
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Summary:We optimize a silica-encapsulated silicon L3 photonic crystal cavity for ultra-high quality factor by means of a global optimization strategy, where the closest holes surrounding the cavity are varied to minimize out-of-plane losses. We find an optimal value of Q c = 4.33 × 10 7 , which is predicted to be in the 2 million regime in presence of structural imperfections compatible with state-of-the-art silicon fabrication tolerances.
ISSN:2045-2322
DOI:10.1038/s41598-021-89410-1