Active‐matrix mesh electronics thin‐film‐transistor arrays for biometrics‐under‐display and biomedical applications

A monolithic manufacturing process is presented for the realization of active‐matrix meshed thin‐film‐transistor (TFT) arrays on foil with physical voids between pixels, realizing membrane‐like electronic arrays. The process is scalable to large‐area substrates and enables (improved performance of)...

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Bibliographic Details
Published in:Journal of the Society for Information Display 2021-05, Vol.29 (5), p.390-404
Main Authors: Kronemeijer, Auke Jisk, Peeters, Bart, Haas, Gerard, Verbeek, Roy, Bel, Thijs, Laar, Robert, Ugalde Lopez, Leslye Astrid, Peters, Laurens C. J. M., Gelinck, Gerwin H.
Format: Article
Language:English
Subjects:
AMOLED
Arrays
biomedical electronics
Biomedical materials
Biometrics
biometrics‐under‐display
Electronics
Electrophysiology
Foils
Medical electronics
Membranes
mesh electronics
Semiconductor devices
smart microwell plates
Substrates
TFT arrays
Thin film transistors
Transistors
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Summary:A monolithic manufacturing process is presented for the realization of active‐matrix meshed thin‐film‐transistor (TFT) arrays on foil with physical voids between pixels, realizing membrane‐like electronic arrays. The process is scalable to large‐area substrates and enables (improved performance of) biometrics‐under‐display applications. Moreover, membrane‐like TFT arrays provide opportunities for the use of TFT technology, and broader large‐area thin‐film electronics, in new applications in the domain of biomedical electronics, as demonstrated by example use cases of in vivo electrophysiology of the brain as well as in vitro electrophysiology in smart microwell plates. A monolithic manufacturing process is presented for the realization of active‐matrix meshed TFT arrays on foil with physical voids between pixels. Membrane‐like TFT arrays enable improved performance of biometric‐under‐display applications and, moreover, provide opportunities for the use of TFT technology in the biomedical domain, such as e.g. brain‐computer interfacing and Organ‐on‐Chip.
ISSN:1071-0922
1938-3657
DOI:10.1002/jsid.1025