As-grown Mn3CuN thin films with high crystallinity prepared by dynamic aurora pulsed laser deposition

Mn3CuN thin films were prepared using dynamic aurora pulsed laser deposition (PLD), which enables magnetic field application during film growth. The magnetic field can stabilize a plasma state of nitrogen in plume generated from a nitride target. Results show that Mn3CuN phase with high crystallinit...

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Bibliographic Details
Published in:Journal of the Ceramic Society of Japan 2021/07/01, Vol.129(7), pp.377-382
Main Authors: KAWAGUCHI, Takahiko, SUZUKI, Jumpei, SAKAMOTO, Naonori, SUZUKI, Hisao, WAKIYA, Naoki
Format: Article
Language:English
Subjects:
Antiperovskite
Auroras
Crystal structure
Crystallinity
Epitaxial growth
Epitaxial thin film
Ferromagnetic materials
Film growth
Magnetic fields
Nitride
Nitrides
Nitrogen plasma
PLD
Pulsed laser deposition
Pulsed lasers
Thin films
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Summary:Mn3CuN thin films were prepared using dynamic aurora pulsed laser deposition (PLD), which enables magnetic field application during film growth. The magnetic field can stabilize a plasma state of nitrogen in plume generated from a nitride target. Results show that Mn3CuN phase with high crystallinity is observed clearly and grown epitaxially on MgO(001) in the as-grown thin films. The as-grown thin films show ferromagnetic transition near 150 K without post-annealing, indicating almost no nitrogen deficiency. These results suggest that dynamic aurora PLD is effective for nitride thin films with high crystallinity.
ISSN:1882-0743
1348-6535
DOI:10.2109/jcersj2.20216