Simulation Study on Airflow Field Uniformity of HFCVD Deposition System by Filament Spacing

Hot filament CVD method had many advantages such as simple equipment, easy operation and low expenses, which made it the most widely used method in industrial producing diamond coated tools. The results showed that when T w was 10 mm, the uniformity of airflow field was the best; when the filament s...

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Bibliographic Details
Published in:Journal of superhard materials 2021-03, Vol.43 (2), p.119-134
Main Authors: Fuming Deng, Hao, Cen, Guo, Zhenhai, Wang, Shuang, Bo, Xiang, Lei, Qing
Format: Article
Language:English
Subjects:
Air flow
Chemistry
Chemistry and Materials Science
Diamond films
Diamond tools
Physical Chemistry
Production
Properties
Simulation
Structure
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Summary:Hot filament CVD method had many advantages such as simple equipment, easy operation and low expenses, which made it the most widely used method in industrial producing diamond coated tools. The results showed that when T w was 10 mm, the uniformity of airflow field was the best; when the filament spacing was T w 1 = 14 mm, T w 2 = 10 mm, T w 3 = 10 mm, T w 4 = 8 mm, T w 5 = 8 mm, it could be produced in larger quantities. The experimental results were consistent with the simulation results, and it was proved that the simulation results could be used to guide the actual experiment.
ISSN:1063-4576
1934-9408
DOI:10.3103/S1063457621020040