Structural defects in ZnO thin films grown by atomic layer deposition at low temperatures

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Bibliographic Details
Published in:Microscopy and microanalysis 2021-08, Vol.27 (S1), p.2660-2662
Main Authors: Elam, David, Ortega, Eduardo, Chabanov, Andrey, Ponce, Arturo
Format: Article
Language:English
Subjects:
Atomic layer epitaxy
Defects in Materials: How We See and Understand Them
Low temperature
Microscopy
Physical Sciences Symposia
Thin films
Zinc oxide
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ISSN:1431-9276
1435-8115
DOI:10.1017/S1431927621009417