Structural defects in ZnO thin films grown by atomic layer deposition at low temperatures

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Published in:Microscopy and microanalysis 2021-08, Vol.27 (S1), p.2660-2662
Main Authors: Elam, David, Ortega, Eduardo, Chabanov, Andrey, Ponce, Arturo
Format: Article
Language:English
Subjects:
Atomic layer epitaxy
Defects in Materials: How We See and Understand Them
Low temperature
Microscopy
Physical Sciences Symposia
Thin films
Zinc oxide
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container_end_page 2662
container_issue S1
container_start_page 2660
container_title Microscopy and microanalysis
container_volume 27
creator Elam, David
Ortega, Eduardo
Chabanov, Andrey
Ponce, Arturo
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doi_str_mv 10.1017/S1431927621009417
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fullrecord <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_journals_2556254295</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><cupid>10_1017_S1431927621009417</cupid><sourcerecordid>2556254295</sourcerecordid><originalsourceid>FETCH-LOGICAL-c1577-61001d95d8e597f7e9e1c0e93fa162b7e67a7d3a6193c01ea93a7ceb52203c563</originalsourceid><addsrcrecordid>eNp1UE1LAzEUDKJgrf4AbwHPq3lJkzRHKX5BoYfqQS9LNvu2btkvk5TSf29qCx7E0xvmzcx7DCHXwG6Bgb5bwkSA4VpxYMxMQJ-QUaJkNgWQpz8Ysv3-nFyEsGaMCabViLwvo9-4uPG2oSVW6GKgdUc_ugWNnwlUddMGuvL9tqPFjtrYt7Wjjd2hT_qhD3Ws-y7xtOm3NGI7oLcpDsMlOatsE_DqOMfk7fHhdfaczRdPL7P7eeZAap2p9C-URpZTlEZXGg2CY2hEZUHxQqPSVpfCKjDCMUBrhNUOC8k5E04qMSY3h9zB918bDDFf9xvfpZM5l1JxOeFGJhUcVM73IXis8sHXrfW7HFi-bzD_02DyiKPHtoWvyxX-Rv_v-gbPXnJ8</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>2556254295</pqid></control><display><type>article</type><title>Structural defects in ZnO thin films grown by atomic layer deposition at low temperatures</title><source>Cambridge Journals Online</source><creator>Elam, David ; Ortega, Eduardo ; Chabanov, Andrey ; Ponce, Arturo</creator><creatorcontrib>Elam, David ; Ortega, Eduardo ; Chabanov, Andrey ; Ponce, Arturo</creatorcontrib><identifier>ISSN: 1431-9276</identifier><identifier>EISSN: 1435-8115</identifier><identifier>DOI: 10.1017/S1431927621009417</identifier><language>eng</language><publisher>New York, USA: Cambridge University Press</publisher><subject>Atomic layer epitaxy ; Defects in Materials: How We See and Understand Them ; Low temperature ; Microscopy ; Physical Sciences Symposia ; Thin films ; Zinc oxide</subject><ispartof>Microscopy and microanalysis, 2021-08, Vol.27 (S1), p.2660-2662</ispartof><rights>Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><cites>FETCH-LOGICAL-c1577-61001d95d8e597f7e9e1c0e93fa162b7e67a7d3a6193c01ea93a7ceb52203c563</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://www.cambridge.org/core/product/identifier/S1431927621009417/type/journal_article$$EHTML$$P50$$Gcambridge$$H</linktohtml><link.rule.ids>314,780,784,27924,27925,72960</link.rule.ids></links><search><creatorcontrib>Elam, David</creatorcontrib><creatorcontrib>Ortega, Eduardo</creatorcontrib><creatorcontrib>Chabanov, Andrey</creatorcontrib><creatorcontrib>Ponce, Arturo</creatorcontrib><title>Structural defects in ZnO thin films grown by atomic layer deposition at low temperatures</title><title>Microscopy and microanalysis</title><addtitle>Microsc Microanal</addtitle><subject>Atomic layer epitaxy</subject><subject>Defects in Materials: How We See and Understand Them</subject><subject>Low temperature</subject><subject>Microscopy</subject><subject>Physical Sciences Symposia</subject><subject>Thin films</subject><subject>Zinc oxide</subject><issn>1431-9276</issn><issn>1435-8115</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2021</creationdate><recordtype>article</recordtype><recordid>eNp1UE1LAzEUDKJgrf4AbwHPq3lJkzRHKX5BoYfqQS9LNvu2btkvk5TSf29qCx7E0xvmzcx7DCHXwG6Bgb5bwkSA4VpxYMxMQJ-QUaJkNgWQpz8Ysv3-nFyEsGaMCabViLwvo9-4uPG2oSVW6GKgdUc_ugWNnwlUddMGuvL9tqPFjtrYt7Wjjd2hT_qhD3Ws-y7xtOm3NGI7oLcpDsMlOatsE_DqOMfk7fHhdfaczRdPL7P7eeZAap2p9C-URpZTlEZXGg2CY2hEZUHxQqPSVpfCKjDCMUBrhNUOC8k5E04qMSY3h9zB918bDDFf9xvfpZM5l1JxOeFGJhUcVM73IXis8sHXrfW7HFi-bzD_02DyiKPHtoWvyxX-Rv_v-gbPXnJ8</recordid><startdate>202108</startdate><enddate>202108</enddate><creator>Elam, David</creator><creator>Ortega, Eduardo</creator><creator>Chabanov, Andrey</creator><creator>Ponce, Arturo</creator><general>Cambridge University Press</general><general>Oxford University Press</general><scope>AAYXX</scope><scope>CITATION</scope><scope>3V.</scope><scope>7QO</scope><scope>7RV</scope><scope>7TK</scope><scope>7X7</scope><scope>7XB</scope><scope>88E</scope><scope>8FD</scope><scope>8FE</scope><scope>8FG</scope><scope>8FH</scope><scope>8FI</scope><scope>8FJ</scope><scope>8FK</scope><scope>ABUWG</scope><scope>AFKRA</scope><scope>ARAPS</scope><scope>AZQEC</scope><scope>BBNVY</scope><scope>BENPR</scope><scope>BGLVJ</scope><scope>BHPHI</scope><scope>CCPQU</scope><scope>DWQXO</scope><scope>FR3</scope><scope>FYUFA</scope><scope>GHDGH</scope><scope>GNUQQ</scope><scope>HCIFZ</scope><scope>K9.</scope><scope>KB0</scope><scope>LK8</scope><scope>M0S</scope><scope>M1P</scope><scope>M7P</scope><scope>NAPCQ</scope><scope>P5Z</scope><scope>P62</scope><scope>P64</scope><scope>PQEST</scope><scope>PQQKQ</scope><scope>PQUKI</scope></search><sort><creationdate>202108</creationdate><title>Structural defects in ZnO thin films grown by atomic layer deposition at low temperatures</title><author>Elam, David ; Ortega, Eduardo ; Chabanov, Andrey ; Ponce, Arturo</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c1577-61001d95d8e597f7e9e1c0e93fa162b7e67a7d3a6193c01ea93a7ceb52203c563</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2021</creationdate><topic>Atomic layer epitaxy</topic><topic>Defects in Materials: How We See and Understand Them</topic><topic>Low temperature</topic><topic>Microscopy</topic><topic>Physical Sciences Symposia</topic><topic>Thin films</topic><topic>Zinc oxide</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Elam, David</creatorcontrib><creatorcontrib>Ortega, Eduardo</creatorcontrib><creatorcontrib>Chabanov, Andrey</creatorcontrib><creatorcontrib>Ponce, Arturo</creatorcontrib><collection>CrossRef</collection><collection>ProQuest Central (Corporate)</collection><collection>Biotechnology Research Abstracts</collection><collection>Nursing &amp; Allied Health Database</collection><collection>Neurosciences Abstracts</collection><collection>Health &amp; Medical Collection</collection><collection>ProQuest Central (purchase pre-March 2016)</collection><collection>Medical Database (Alumni Edition)</collection><collection>Technology Research Database</collection><collection>ProQuest SciTech Collection</collection><collection>ProQuest Technology Collection</collection><collection>ProQuest Natural Science Collection</collection><collection>Hospital Premium Collection</collection><collection>Hospital Premium Collection (Alumni Edition)</collection><collection>ProQuest Central (Alumni) (purchase pre-March 2016)</collection><collection>ProQuest Central (Alumni)</collection><collection>ProQuest Central UK/Ireland</collection><collection>Advanced Technologies &amp; Aerospace Collection</collection><collection>ProQuest Central Essentials</collection><collection>Biological Science Collection</collection><collection>ProQuest Central</collection><collection>Technology Collection</collection><collection>ProQuest Natural Science Collection</collection><collection>ProQuest One Community College</collection><collection>ProQuest Central Korea</collection><collection>Engineering Research Database</collection><collection>Health Research Premium Collection</collection><collection>Health Research Premium Collection (Alumni)</collection><collection>ProQuest Central Student</collection><collection>SciTech Premium Collection</collection><collection>ProQuest Health &amp; Medical Complete (Alumni)</collection><collection>Nursing &amp; Allied Health Database (Alumni Edition)</collection><collection>ProQuest Biological Science Collection</collection><collection>Health &amp; Medical Collection (Alumni Edition)</collection><collection>Medical Database</collection><collection>Biological Science Database</collection><collection>Nursing &amp; Allied Health Premium</collection><collection>ProQuest advanced technologies &amp; aerospace journals</collection><collection>ProQuest Advanced Technologies &amp; Aerospace Collection</collection><collection>Biotechnology and BioEngineering Abstracts</collection><collection>ProQuest One Academic Eastern Edition (DO NOT USE)</collection><collection>ProQuest One Academic</collection><collection>ProQuest One Academic UKI Edition</collection><jtitle>Microscopy and microanalysis</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Elam, David</au><au>Ortega, Eduardo</au><au>Chabanov, Andrey</au><au>Ponce, Arturo</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Structural defects in ZnO thin films grown by atomic layer deposition at low temperatures</atitle><jtitle>Microscopy and microanalysis</jtitle><addtitle>Microsc Microanal</addtitle><date>2021-08</date><risdate>2021</risdate><volume>27</volume><issue>S1</issue><spage>2660</spage><epage>2662</epage><pages>2660-2662</pages><issn>1431-9276</issn><eissn>1435-8115</eissn><cop>New York, USA</cop><pub>Cambridge University Press</pub><doi>10.1017/S1431927621009417</doi><tpages>3</tpages><oa>free_for_read</oa></addata></record>
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1435-8115
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source Cambridge Journals Online
subjects Atomic layer epitaxy
Defects in Materials: How We See and Understand Them
Low temperature
Microscopy
Physical Sciences Symposia
Thin films
Zinc oxide
title Structural defects in ZnO thin films grown by atomic layer deposition at low temperatures
url http://sfxeu10.hosted.exlibrisgroup.com/loughborough?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-28T05%3A00%3A49IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Structural%20defects%20in%20ZnO%20thin%20films%20grown%20by%20atomic%20layer%20deposition%20at%20low%20temperatures&rft.jtitle=Microscopy%20and%20microanalysis&rft.au=Elam,%20David&rft.date=2021-08&rft.volume=27&rft.issue=S1&rft.spage=2660&rft.epage=2662&rft.pages=2660-2662&rft.issn=1431-9276&rft.eissn=1435-8115&rft_id=info:doi/10.1017/S1431927621009417&rft_dat=%3Cproquest_cross%3E2556254295%3C/proquest_cross%3E%3Cgrp_id%3Ecdi_FETCH-LOGICAL-c1577-61001d95d8e597f7e9e1c0e93fa162b7e67a7d3a6193c01ea93a7ceb52203c563%3C/grp_id%3E%3Coa%3E%3C/oa%3E%3Curl%3E%3C/url%3E&rft_id=info:oai/&rft_pqid=2556254295&rft_id=info:pmid/&rft_cupid=10_1017_S1431927621009417&rfr_iscdi=true