ChemiSEM: multimodal approach for faster quantitative elemental mapping

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Bibliographic Details
Published in:Microscopy and microanalysis 2021-08, Vol.27 (S1), p.1302-1304
Main Authors: Wandrol, Petr, Tuma, Tomas, Klusacek, Jan, Petrek, Jiri, Vesseur, Ernst Jan, Stephens, Chris
Format: Article
Language:English
Subjects:
Analytical Sciences Symposia
Chemical elements
Failure analysis
Mapping
Microscopy and Microanalysis for Real World Problem Solving
Scanning electron microscopy
Titanium
X-rays
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ISSN:1431-9276
1435-8115
DOI:10.1017/S1431927621004864