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Strain Engineering in Aluminum Scandium Nitride Thin Film using Four-dimensional Scanning Transmission Electron Microscopy (4D-STEM) Technique

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Bibliographic Details
Published in:	Microscopy and microanalysis 2021-08, Vol.27 (S1), p.2204-2205
Main Authors:	Musavigharavi, Pariasadat, Meng, Andrew, Wang, Dixiong, Zheng, Jeffery, Foucher, Alexandre, Olsson, Roy H., Stach, Eric
Format:	Article
Language:	English
Subjects:	Aluminum Analytical Sciences Symposia Diffraction Imaging Across Disciplines Scandium Scanning transmission electron microscopy Thin films Transmission electron microscopy
Citations:	Items that this one cites
Online Access:	Get full text
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