Optimization of a Flexible Film Bulk Acoustic Resonator-Based Toluene Gas Sensor

Flexible electronics have attracted wide attention for a variety of applications in the last few years; some based on components such as diodes and transistors have been reported earlier. This paper reports an optimized design of a flexible film bulk acoustic resonator suitable as a sensor for tolue...

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Bibliographic Details
Published in:Journal of electronic materials 2021-09, Vol.50 (9), p.5387-5395
Main Authors: Johar, Arun Kishor, Sharma, Gaurav Kumar, Kumar, Tangudu Bharat, Varma, Tarun, Periasamy, C., Agarwal, Ajay, Boolchandani, D.
Format: Article
Language:English
Subjects:
Aluminum
Bragg reflectors
Bulk acoustic wave devices
Characterization and Evaluation of Materials
Chemistry and Materials Science
Coated electrodes
Coupling coefficients
Design optimization
Electronics and Microelectronics
Figure of merit
Finite element method
Flexible components
Gas sensors
Instrumentation
Lead zirconate titanates
Materials Science
Optical and Electronic Materials
Original Research Article
Piezoelectricity
Polydimethylsiloxane
Polyethylene terephthalate
Q factors
Resonant frequencies
Resonators
Sensors
Solid State Physics
Substrates
Thickness
Toluene
Transistors
Zinc oxide
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Summary:Flexible electronics have attracted wide attention for a variety of applications in the last few years; some based on components such as diodes and transistors have been reported earlier. This paper reports an optimized design of a flexible film bulk acoustic resonator suitable as a sensor for toluene gas detection with polyethylene terephthalate as flexible substrate. Aluminium nitride, lead zirconate titanate, and zinc oxide were chosen as the piezoelectric materials, and a polydimethylsiloxane (PDMS) coated electrode was placed on top to perform as a functional layer for sensing. Finite element modeling was used for the optimization of PDMS flexible film. The paper also reports the effect of different piezoelectric materials used, Bragg reflector stages and effect of PDMS layer thickness on the performance of the sensor. The optimal sensor configuration was obtained using Taguchi DoE and ANOVA techniques. For the optimized structure, simulated values of coupling coefficient, quality factor and figure of merit are 0.237574 (or 23.7574%), 991 and ~ 235, respectively. The sensor exposure to toluene in the concentrations from 0 to 500 ppm resulted in down shifting of its resonant frequency. Sensitivity of 12 kHz/ppm has been observed and reported.
ISSN:0361-5235
1543-186X
DOI:10.1007/s11664-021-09059-4