Photovoltaic intelligent gas sensors for the detection of acetone concentration over a wide range of measurement for biomedical applications and tasks of public safety

This report presents experimental studies of electrical changes in photovoltaic sensitive elements based on a Por-Si: c-Si heterojunction during the adsorption of acetone molecules in a mixture of pure nitrogen. The porous silicon layer was formed by electrochemical etching on a p-type silicon wafer...

Full description

Saved in:
Bibliographic Details
Published in:IOP conference series. Materials Science and Engineering 2020-01, Vol.715 (1), p.12094
Main Authors: Vashpanov, Yuriy, Son, Jung-Young, Heo, Gwanghee, Kwack, Kae-Dal
Format: Article
Language:English
Subjects:
Acetone
Adsorption
Biomedical materials
Chemical treatment
Electrical properties
Electrochemical etching
Gas sensors
Heterojunctions
Porous silicon
Public safety
Sensitivity
Sensors
Silicon wafers
Surface treatment
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:This report presents experimental studies of electrical changes in photovoltaic sensitive elements based on a Por-Si: c-Si heterojunction during the adsorption of acetone molecules in a mixture of pure nitrogen. The porous silicon layer was formed by electrochemical etching on a p-type silicon wafer. The obtained samples were subjected to additional plasma-chemical treatment using hydrogen and fluoride ions after fabrication. Such surface treatment has a stabilizing effect on the electrical properties of the material and increases their adsorption sensitivity to polar molecules. The developed technology allows you to automatically change the sensitivity of photovoltaic sensors during the experiment, depending on the concentration of acetone. These photovoltaic sensors are able to expand the range of measured concentrations from 1 ppm to 10 vol%.
ISSN:1757-8981
1757-899X
DOI:10.1088/1757-899X/715/1/012094