15.1: Invited Paper: A Low‐Temperature Elevated‐Metal Metal‐Oxide Thin‐Film Transistor Technology for Flexible Electronics

A low‐temperature technology based on the elevated‐metal metal‐oxide thin‐film transistor (TFT) architecture was developed for realizing electronic systems on flexible polyimide (PI) substrates. An excimer laser was used to lift‐off the PI from a glass carrier substrate. The performance of the TFTs...

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Bibliographic Details
Published in:SID International Symposium Digest of technical papers 2021-08, Vol.52 (S2), p.202-205
Main Authors: Shi, Runxiao, Lei, Tengteng, Wang, Sisi, Xia, Zhihe, Wong, Man
Format: Article
Language:English
Subjects:
Analog circuits
Circuit design
Depletion
Electronic systems
Excimer lasers
Excimers
Flexible components
Flexible electronic
Fluorination
Glass substrates
Logic circuits
Metal oxide semiconductors
Semiconductor devices
TFTs
Thin film transistors
Threshold voltage
Transistors
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Summary:A low‐temperature technology based on the elevated‐metal metal‐oxide thin‐film transistor (TFT) architecture was developed for realizing electronic systems on flexible polyimide (PI) substrates. An excimer laser was used to lift‐off the PI from a glass carrier substrate. The performance of the TFTs before and after the laser‐lift‐off exhibits insignificant difference. A variety of digital and analog circuit building blocks were simulated, fabricated and characterized. Finally, ratio‐less logic circuits based on depletion‐and enhancement‐mode TFTs have been designed. The threshold voltage can be adjusted by selective fluorination, choice of semiconducting MO or a dual‐gate architecture.
ISSN:0097-966X
2168-0159
DOI:10.1002/sdtp.15066