Low-frequency ferromagnetic enhanced inductively coupled plasma for plasma-assisted nitriding

Experimental investigation of low-frequency (100 kHz) nitrogen inductively coupled plasma with magnetic coupling enhanced by ferrite cores has been carried out, for nitrogen pressures of 50-200 mTorr. Discharge electric field strength and ion density were measured for various discharge currents. Pla...

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Bibliographic Details
Published in:Journal of physics. Conference series 2018-11, Vol.1105 (1), p.12119
Main Authors: Isupov, M V, Pinaev, V A
Format: Article
Language:English
Subjects:
Discharge
Electric field strength
Ferromagnetism
Inductively coupled plasma
Ion density (concentration)
Nitriding
Plasma
Titanium
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Summary:Experimental investigation of low-frequency (100 kHz) nitrogen inductively coupled plasma with magnetic coupling enhanced by ferrite cores has been carried out, for nitrogen pressures of 50-200 mTorr. Discharge electric field strength and ion density were measured for various discharge currents. Plasma-assisted nitriding of titanium test samples was performed for sample bias of -1200 V and sample current density of 1 mA/cm2. Formation of hexagonal ω-Ti and tetragonal TiN phases was revealed.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/1105/1/012119