Experimental and numerical study of a low-frequency ferromagnetic enhanced inductively coupled plasma

Low-frequency ferromagnetic-enhanced inductively coupled plasma (FMICP) has been investigated under conditions typical for large-scale plasma processing. Radial profiles of ion density and plasma floating potential were determined with a Langmuir probe. A self-consistent radial kinetic model of argo...

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Bibliographic Details
Published in:Journal of physics. Conference series 2018-11, Vol.1105 (1), p.12117
Main Authors: Isupov, M V, Fedoseev, A V, Sukhinin, G I, Pinaev, V A
Format: Article
Language:English
Subjects:
Argon
Boltzmann transport equation
Distribution functions
Electric fields
Electron energy distribution
Ferromagnetism
Inductively coupled plasma
Ion density (concentration)
Plasma
Plasma processing
Poisson equation
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Summary:Low-frequency ferromagnetic-enhanced inductively coupled plasma (FMICP) has been investigated under conditions typical for large-scale plasma processing. Radial profiles of ion density and plasma floating potential were determined with a Langmuir probe. A self-consistent radial kinetic model of argon FMICP was developed, based on the simultaneous solution of a non-local Boltzmann equation for the electron energy distribution function, balance equations for the ion and metastable argon atom densities, the thermal balance equation and the Poisson equation for a self-consistent radial electric field. A satisfactory agreement between the numerical and experimental results was found that confirms the validity of the presented approach to the description of the FMICP.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/1105/1/012117