Detection of Chlorine by field effect sensor

The gas analytical system for chlorine gas measurement based on metal-insulator-semiconductor field effect (MIS FE) type sensor has been developed. High sensitivity of MIS FE sensor to chlorine allows measuring concentrations in the sub-ppb level and to be stable for overload hydrogen gas concentrat...

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Bibliographic Details
Published in:Journal of physics. Conference series 2019-06, Vol.1236 (1), p.12086
Main Authors: Samotaev, N N, Litvinov, A V, Etrekova, M O
Format: Article
Language:English
Subjects:
Chlorine
Electrolysis
Environmental control
Insulators
MIS (semiconductors)
Pulse heating
Sensors
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Description
Summary:The gas analytical system for chlorine gas measurement based on metal-insulator-semiconductor field effect (MIS FE) type sensor has been developed. High sensitivity of MIS FE sensor to chlorine allows measuring concentrations in the sub-ppb level and to be stable for overload hydrogen gas concentration typically present in industrial electrolysis application. With the pulse heating mode, the response and relaxation times of the MIS sensor are reduced by an order of magnitude which gives chance to use one for high precision environmental control.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/1236/1/012086