Wafer-scale fabrication of target arrays for stable generation of proton beams by laser-plasma interaction

Large-scale fabrication of targets for laser-driven acceleration of ion beams is a prerequisite to establish suitable applications, and to keep up with the challenge of increasing repetition rate of currently available high-power lasers. Here we present manufacturing and test results of large arrays...

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Bibliographic Details
Published in:Journal of physics. Conference series 2018-08, Vol.1079 (1), p.12007
Main Authors: Zaffino, R L, Seimetz, M, Ruiz, A, Sanchez, I, Mur, P, Bellido, P, Lera, R, Quirion, D, Martín, L, Benlliure, J, Benlloch, J M, Lozano, M, Pellegrini, G
Format: Article
Language:English
Subjects:
Arrays
Atomic force microscopy
Chemical vapor deposition
Energy value
High power lasers
Ion beams
Laser beams
Laser plasma interactions
Lasers
Microelectromechanical systems
Micromachining
Parallel processing
Photolithography
Physical vapor deposition
Physics
Plasma interactions
Proton beams
Proton energy
Sapphire
Titanium
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Summary:Large-scale fabrication of targets for laser-driven acceleration of ion beams is a prerequisite to establish suitable applications, and to keep up with the challenge of increasing repetition rate of currently available high-power lasers. Here we present manufacturing and test results of large arrays of solid targets for TNSA laser-driven ion acceleration. By applying micro-electro-mechanical-system (MEMS) based methods allowing for parallel processing of thousands of targets on a single Si wafer, sub-micrometric, thin-layer metallic membranes were fabricated by combining photolithography, physical and chemical vapor deposition, selective etching, and Si micromachining. These structures were characterized by using optical and atomic force microscopy. Their performance for the production of laser-driven proton beams was tested on a purpose-made table-top Ti:Sapphire laser system running at 3 TW peak power with a contrast over ASE of 108. We have performed several test series achieving maximum proton energy values around 2 MeV.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/1079/1/012007