Optimization of Sodium Potassium Niobate Thin Films with Different Deposition Layers

Sodium Potassium Niobate, KNN with different deposition layers on Si substrate was successfully prepared by sol-gel spin coating and subsequently annealed at 650°C for 10 min. Several deposition layers of KNN were systematically studied with different characterizations. The KNN thin films with five...

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Bibliographic Details
Published in:Journal of physics. Conference series 2018-08, Vol.1082 (1), p.12053
Main Authors: Azlan, U.A.A., Azmi, N.A., Hatta, M.A.M., Rashid, M.W.A., Abid, M.A.A.M.
Format: Article
Language:English
Subjects:
Deposition
Homogeneity
Optimization
Physics
Potassium
Potassium niobates
Raman spectroscopy
Silicon substrates
Sodium
Sol-gel processes
Spin coating
Surface roughness
Thickness measurement
Thin films
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Summary:Sodium Potassium Niobate, KNN with different deposition layers on Si substrate was successfully prepared by sol-gel spin coating and subsequently annealed at 650°C for 10 min. Several deposition layers of KNN were systematically studied with different characterizations. The KNN thin films with five deposition layers showed a good result in terms of its homogeneity and uniformity of thickness that was measured to be around 280 nm. Further study on the surface roughness was obtained by AFM and its value of around 1.698 nm was recorded from the scanned area of 1 µm × 1 µm of thin films. It was also reported that the NbO6 octahedral vibrational modes of υ6, υ5, υ4, υ2, υ1, υ3, υ1+υ5 was detected in a wide range of 200 cm−1 to 900 cm−1, shown by Raman analysis. The elemental composition was also studied and the results were confirmed with deconvolution of XRF spectrum.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/1082/1/012053