Optical Properties and UV Sensing Response of Nitrogen-doped TiO2 Thin Film by CVD

This work was demonstrated a cold-wall chemical vapour deposition (CVD) setup to prepare nitrogen (N)-doped titanium dioxide (TiO2) thin film on glass substrates, which presents semi-transparent yellowish surface. The prepared N-doped TiO2 film is homogeneous and possesses polycrystalline anatase st...

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Bibliographic Details
Published in:Journal of physics. Conference series 2018-08, Vol.1083 (1)
Main Authors: Ng, Siowwoon, Siong Tneh, Sau, Kwong Yam, Fong, Hassan, Zainuriah
Format: Article
Language:English
Subjects:
Anatase
Chemical vapor deposition
Film thickness
Glass substrates
Nitrogen
Optical properties
Physics
Thin films
Titanium
Titanium dioxide
Ultraviolet detectors
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Summary:This work was demonstrated a cold-wall chemical vapour deposition (CVD) setup to prepare nitrogen (N)-doped titanium dioxide (TiO2) thin film on glass substrates, which presents semi-transparent yellowish surface. The prepared N-doped TiO2 film is homogeneous and possesses polycrystalline anatase structure. The transmittance measurement was carried out in the ultraviolet-visible spectral region to evaluate the film thickness, optical constants, and the optical band gap was determined by Tauc plot. A metal-semiconductor-metal (MSM) ultraviolet (UV) photodetector by the Pt/N-doped TiO2 film has shown a positive response towards UV illumination.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/1083/1/012025