The peculiarities of CVD diamond coatings synthesis in abnormal glow discharge plasma using repetitively-pulsed mode

We report about the features of polycrystalline diamond coatings CVD synthesis in repetitively-pulsed plasma of abnormal glow discharge. The discharge burning time was varied from 0.5 to 10 ms with proportional pauses. The dependences of deposited diamond films growth rate on the durations of the di...

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Bibliographic Details
Published in:Journal of physics. Conference series 2017-05, Vol.830 (1), p.12118
Main Authors: Linnik, S A, Gaydaychuk, A V, Okhotnikov, V V
Format: Article
Language:English
Subjects:
Burning rate
Burning time
Chemical vapor deposition
Coatings
Diamond films
Filaments
Glow discharges
Phase composition
Physics
Polycrystalline diamond
Raman spectroscopy
Substrates
Synthesis
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Summary:We report about the features of polycrystalline diamond coatings CVD synthesis in repetitively-pulsed plasma of abnormal glow discharge. The discharge burning time was varied from 0.5 to 10 ms with proportional pauses. The dependences of deposited diamond films growth rate on the durations of the discharge burning and pauses are presented. The mutual influence of two plasma filaments on each other and onto the substrate has unequivocally established. Raman spectroscopy, X-ray diffractometry and SEM were used for identification of phase composition and microstructure of deposited films. Implementation simplicity and reliability of the proposed discharge system may find application in diamond film deposition industries.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/830/1/012118