Sputtering layers of different materials on tungsten surface by light ions of medium energy bombardment

There is an analytical formula allows to calculate the sputtering yields of heterogonous solid targets with light ions, based on the model of sputtering layered surfaces with light ions. Of particular interest is the sputtering of layers of different materials with the tungsten surface, which can be...

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Bibliographic Details
Published in:Journal of physics. Conference series 2017-11, Vol.891 (1), p.12308
Main Author: Manukhin, V V
Format: Article
Language:English
Subjects:
Computer simulation
Ion bombardment
Light ions
Physics
Sputtering
Tungsten
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Summary:There is an analytical formula allows to calculate the sputtering yields of heterogonous solid targets with light ions, based on the model of sputtering layered surfaces with light ions. Of particular interest is the sputtering of layers of different materials with the tungsten surface, which can be a material for the first wall of fusion reactor. The results of the calculations are in good agreement with the data of computer simulation, and show that the sputtering yields layers with a certain thickness, higher than the sputtering yields of homogeneous material layer targets ("mirror effect").
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/891/1/012308