Three-axis MEMS Accelerometer for Structural Inspection

Microelectromechanical system accelerometers are widely used for metrological measurements of acceleration, tilt, vibration, and shock in moving objects. The paper presents the analysis of MEMS accelerometer that can be used for the structural inspection. ANSYS Multiphysics platform is used to simul...

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Bibliographic Details
Published in:Journal of physics. Conference series 2016-01, Vol.671 (1), p.12003
Main Authors: Barbin, E, Koleda, A, Nesterenko, T, Vtorushin, S
Format: Article
Language:English
Subjects:
Accelerometers
CAD
Computer aided design
Dynamical systems
Finite element method
Inspection
Mathematical models
Microelectromechanical systems
Nonlinear dynamics
Nonlinear systems
Physics
Three axis
Vibration analysis
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Summary:Microelectromechanical system accelerometers are widely used for metrological measurements of acceleration, tilt, vibration, and shock in moving objects. The paper presents the analysis of MEMS accelerometer that can be used for the structural inspection. ANSYS Multiphysics platform is used to simulate the behavior of MEMS accelerometer by employing a finite element model and MATLAB Simulink tools for modeling nonlinear dynamic systems.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/671/1/012003