Development and UHV testing of LN2 cooled Titanium Sublimation Pump

Titanium sublimation pumps (TSP) provide inexpensive large pumping speeds for active gases especially in UHV environment where residual gases are mainly H2 and CO etc. The pumping speed of TSP is independent of pressure in this range. Sublimation of Ti on liquid nitrogen (LN2) cooled surfaces is exp...

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Bibliographic Details
Main Authors: K V A N P S Kumar, Bansod, Tripti, Shukla, S K
Format: Conference Proceeding
Language:English
Subjects:
Cryogenic engineering
Liquid nitrogen
Physics
Pumping
Quadrupoles
Rare gases
Room temperature
Sublimation
Titanium
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Summary:Titanium sublimation pumps (TSP) provide inexpensive large pumping speeds for active gases especially in UHV environment where residual gases are mainly H2 and CO etc. The pumping speed of TSP is independent of pressure in this range. Sublimation of Ti on liquid nitrogen (LN2) cooled surfaces is expected to provide large porosity in deposited film and this may also result in further enhancement of its pumping speed. Accordingly a liquid nitrogen cooled TSP was developed to achieve clean vacuum in 10−11 mbar range in combination of sputter ion pump which is mainly used to take care of inert gas load. The LN2 shroud was designed to have 1.9 litre capacity and offered approximately 2000 cm2 cooled surface area with approximately 250cm2 area coated with titanium film. This paper describes the performance of the TSP at room temperature as well as after cooling with LN2. Quadrupole mass analyzer was utilized to analyze residual gases. Simultaneously for pumping speed measurements for different gasses, a setup with known conductance was also appended.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/390/1/012022