Low-Cost, High-Performance Piezoelectric Nanocomposite for Mechanical Energy Harvesting

Lack of low-cost, large area deposition methods and photo-patternability of high-performance piezoelectric materials restrict the rapid development of efficient functional devices like sensors and energy harvesters. In this paper, we report an optimized process flow for Zinc Oxide (ZnO)/SU-8 and Bar...

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Bibliographic Details
Published in:IEEE sensors journal 2021-10, Vol.21 (19), p.21268-21276
Main Authors: Beigh, Nadeem Tariq, Mallick, Dhiman
Format: Article
Language:English
Subjects:
Barium titanates
BTO
Circuits
energy harvester
Energy harvesting
hybrid energy harvester
II-VI semiconductor materials
Low cost
Mechanical sensors
Nanocomposites
nanogenerator
Nanogenerators
Nanoscale devices
photopatternability
piezo-tribo transduction
Piezoelectric nanocomposite
Piezoelectricity
Powders
Process variables
Thin films
Zinc oxide
Zinc oxides
ZnO
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Summary:Lack of low-cost, large area deposition methods and photo-patternability of high-performance piezoelectric materials restrict the rapid development of efficient functional devices like sensors and energy harvesters. In this paper, we report an optimized process flow for Zinc Oxide (ZnO)/SU-8 and Barium Titanate (BTO)/SU-8 based nanocomposite thin films for mechanical energy harvesting (MEH) applications. Parametric variation of process variables for these nanocomposites reveals that 15% ZnO/SU-8 and 20% BTO/SU-8 nanocomposites show optimum results with good piezoelectric response and UV transmittance, allowing reliable lithography of the nanocomposites. Furthermore, three different types of energy harvesting devices are fabricated using these nanocomposites as piezoelectric layer. Output powers of 223~\mu \text{W} (ZnO/SU-8) and 642~\mu \text{W} (BTO/SU-8) are produced at resonance for the conventional cantilever type MEH devices at an input acceleration of 0.5g. Using the nanocomposites as flexible nanogenerator, open circuit voltages of 570 mV (ZnO/SU-8) and 780mV (BTO/SU-8) are obtained using regular finger pressing. The hybrid energy harvesters, based on combined piezoelectric-triboelectric transduction mechanisms, generate output voltages of 0.4V, 0.95V, 1.4V (ZnO/SU-8) and 0.7V, 1.1V and 1.9V (BTO/SU-8) in piezoelectric, triboelectric and hybrid operations, respectively.
ISSN:1530-437X
1558-1748
DOI:10.1109/JSEN.2021.3100869