Reactivity of Hydroxyl Groups on the Surface of Solid Oxides in Atomic Layer Deposition Processes

— This paper demonstrates the feasibility of using induction constants for quantitatively assessing the reactivity of hydroxyl groups on the surface of some solid oxides in the synthesis of nanostructures by molecular layering (atomic layer deposition). It is shown that a surface reaction can reach...

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Bibliographic Details
Published in:Inorganic materials 2021-09, Vol.57 (9), p.913-918
Main Author: Ezhovskii, Yu. K.
Format: Article
Language:English
Subjects:
Aluminum
Atomic layer epitaxy
Beryllium oxide
Chemical synthesis
Chemistry
Chemistry and Materials Science
Hydroxyl groups
Industrial Chemistry/Chemical Engineering
Inorganic Chemistry
Magnesium
Materials Science
Reagents
Surface reactions
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Summary:— This paper demonstrates the feasibility of using induction constants for quantitatively assessing the reactivity of hydroxyl groups on the surface of some solid oxides in the synthesis of nanostructures by molecular layering (atomic layer deposition). It is shown that a surface reaction can reach completion if hydroxyl groups have a larger induction constant than does the active group of the reagent. The proposed approach is substantiated and experimental data are presented for solid silicon, aluminum, magnesium, titanium, and beryllium oxides.
ISSN:0020-1685
1608-3172
DOI:10.1134/S0020168521090065