Soft x-ray zone plate fabrication at KTH, Stockholm

We present the status of our zone plate and test object fabrication processes along with the latest fabricated components. With our nickel process, zone plates with outermost zone width of 20 nm and zone height of 90 nm have been fabricated. A gold electroplating process has recently been introduced...

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Bibliographic Details
Published in:Journal of physics. Conference series 2009-09, Vol.186 (1), p.012065, Article 012065
Main Authors: Holmberg, A, Lindblom, M, Reinspach, J, Bertilsson, M, Hertz, H M
Format: Article
Language:English
Subjects:
CONDENSER
Electroplating
Fysik
Gold
MICROSCOPY
NATURAL SCIENCES
NATURVETENSKAP
Physics
Soft x rays
Zone plates
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Summary:We present the status of our zone plate and test object fabrication processes along with the latest fabricated components. With our nickel process, zone plates with outermost zone width of 20 nm and zone height of 90 nm have been fabricated. A gold electroplating process has recently been introduced for the fabrication of test objects. The first result for gold gratings with 70 nm period and 135 nm height is shown.
ISSN:1742-6596
1742-6588
1742-6596
DOI:10.1088/1742-6596/186/1/012065