Electro-oxidative lithography by STM as a proximity electrode of electrically conducting DLC

Carbon-based solids with active surface sites, including electrically conductive diamond-like carbon (DLC), will undergo electro-oxidative conversion to CO2 in an aqueous phase; the reaction takes place either in a thin film of adsorbed moisture, or in an aqueous fluid cell. The process can be local...

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Bibliographic Details
Published in:Journal of physics. Conference series 2007-04, Vol.61 (1), p.841-846
Main Authors: Mühl, T, Myhra, S
Format: Article
Language:English
Subjects:
Diamond-like carbon
Diamond-like carbon films
Masking
Physics
Spatial resolution
Thin films
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Summary:Carbon-based solids with active surface sites, including electrically conductive diamond-like carbon (DLC), will undergo electro-oxidative conversion to CO2 in an aqueous phase; the reaction takes place either in a thin film of adsorbed moisture, or in an aqueous fluid cell. The process can be localized by conventional masking, or by a mask-less configuration based on using a scanning tunneling probe as a proximity electrode. In the former case the technology is parallel and spatial resolution is determined by the masking, while in the latter case the technology is serial, but line widths of 10 nm can be obtained.
ISSN:1742-6596
1742-6588
1742-6596
DOI:10.1088/1742-6596/61/1/168