Laser multifunctional fabrication of metallic microthermal components embedded in fused silica for microfluidic applications

•Metallic microthermal components embedded in fused silica glass have been fabricated.•Localized manipulation and in-situ detection of temperature have been demonstrated.•Precise control of temperature in glass microfluidic channels have been realized. Microheaters as tiny in-situ heating elements a...

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Bibliographic Details
Published in:Optics and laser technology 2021-12, Vol.144, p.107413, Article 107413
Main Authors: Li, Xiaolong, Xu, Jian, Zhang, Aodong, Peng, Huaiyu, Zhang, Jie, Li, Yucen, Hu, Ming, Lin, Zijie, Song, Yunpeng, Chu, Wei, Wang, Zhenhua, Cheng, Ya
Format: Article
Language:English
Subjects:
Acceleration
Chemical etching
Chemical reactions
Electroless plating
Embedded microstructures
Femtosecond laser microfabrication
Fused silica
Glass microfluidics
Lasers
Mechanical polishing
Metallic microheaters
Microfluidics
Microthermal sensors
Sensor arrays
Silicon dioxide
Stability
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Summary:•Metallic microthermal components embedded in fused silica glass have been fabricated.•Localized manipulation and in-situ detection of temperature have been demonstrated.•Precise control of temperature in glass microfluidic channels have been realized. Microheaters as tiny in-situ heating elements are of great importance for developing many thermal-sensitive microdevice applications. A facile technique for the fabrication of embedded metallic microheaters, microheater arrays, and microthermal sensors based on the combination of femtosecond laser-assisted chemical etching, electroless plating, and mechanical polishing has been proposed. With the proposed technique, uniform and controllable temperature distributions in the central area of fabricated microheaters have been achieved. Moreover, flexible manipulation of localized temperature in a microheater array as well as precise calibration of microheaters based on a simultaneously integrated microthermal sensor has been demonstrated. Furthermore, precise control of temperature in glass channels and acceleration of a chemical reaction in microfluidics using monolithically integrated microheaters have been realized, showing great potential for developing laser manufacturing of multifunctional thermal-control microfluidic devices.
ISSN:0030-3992
1879-2545
DOI:10.1016/j.optlastec.2021.107413