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On the Air Buoyancy Effect in MEMS-Based Gravity Sensors for High Resolution Gravity Measurements
In this paper, the air buoyancy effect on Micro-Electro-MechanicalSystem (MEMS)-based gravity sensors for high-resolution gravity measurements is investigated. The MEMS gravimeter is operated in an atmospheric environment without any vacuum chamber; thus significantly simplifying the design, impleme...
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Published in: | IEEE sensors journal 2021-10, Vol.21 (20), p.22480-22488 |
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description | In this paper, the air buoyancy effect on Micro-Electro-MechanicalSystem (MEMS)-based gravity sensors for high-resolution gravity measurements is investigated. The MEMS gravimeter is operated in an atmospheric environment without any vacuum chamber; thus significantly simplifying the design, implementation and maintenance, and reducing the cost of the instrument. It is experimentally observed that the measured acceleration signal shows a clear correlation with the air buoyancy, and consequently the air pressure. A detailed theoretical model of the air buoyant force acting on the MEMS gravity sensor is proposed, giving a gravity-air pressure coefficient of 501.5 \mu Gal/hPa for the silicon springmass system. After removing the error introduced by the air buoyant force, the MEMS gravity sensor exhibits an ultra-low self-noise floor of 1 \mu {\mathrm {Gal}}/\sqrt{\rm Hz} @1 Hz, as well as an excellent stability, with an Allan deviation of 3 \mu Gal (40 s integration time). The sensor is capable of measuring the Earth tides in a 16-day span. This discovery identified one major error source in high-resolution MEMS gravity sensors operating in atmosphere, which could potentially be useful for the development of future MEMS-based gravimeters. |
doi_str_mv | 10.1109/JSEN.2021.3106667 |
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The MEMS gravimeter is operated in an atmospheric environment without any vacuum chamber; thus significantly simplifying the design, implementation and maintenance, and reducing the cost of the instrument. It is experimentally observed that the measured acceleration signal shows a clear correlation with the air buoyancy, and consequently the air pressure. A detailed theoretical model of the air buoyant force acting on the MEMS gravity sensor is proposed, giving a gravity-air pressure coefficient of 501.5 <inline-formula> <tex-math notation="LaTeX">\mu </tex-math></inline-formula>Gal/hPa for the silicon springmass system. After removing the error introduced by the air buoyant force, the MEMS gravity sensor exhibits an ultra-low self-noise floor of 1 <inline-formula> <tex-math notation="LaTeX">\mu {\mathrm {Gal}}/\sqrt{\rm Hz} </tex-math></inline-formula>@1 Hz, as well as an excellent stability, with an Allan deviation of 3 <inline-formula> <tex-math notation="LaTeX">\mu </tex-math></inline-formula>Gal (40 s integration time). The sensor is capable of measuring the Earth tides in a 16-day span. This discovery identified one major error source in high-resolution MEMS gravity sensors operating in atmosphere, which could potentially be useful for the development of future MEMS-based gravimeters.]]></description><identifier>ISSN: 1530-437X</identifier><identifier>EISSN: 1558-1748</identifier><identifier>DOI: 10.1109/JSEN.2021.3106667</identifier><identifier>CODEN: ISJEAZ</identifier><language>eng</language><publisher>New York: IEEE</publisher><subject>Acceleration measurement ; Accelerometers ; air buoyancy ; Buoyancy ; Earth tides ; Gravimeters ; Gravity ; Gravity measurement ; gravity sensor ; High resolution ; high-stability ; MEMS devices ; Micromechanical devices ; Sensors ; Temperature measurement ; Temperature sensors ; Vacuum chambers</subject><ispartof>IEEE sensors journal, 2021-10, Vol.21 (20), p.22480-22488</ispartof><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2021</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c293t-439b514f26c0c35d7c6c91cea784b9a5a07d571c22efe89a64de15b99a719c863</citedby><cites>FETCH-LOGICAL-c293t-439b514f26c0c35d7c6c91cea784b9a5a07d571c22efe89a64de15b99a719c863</cites><orcidid>0000-0002-6324-872X ; 0000-0001-8400-433X ; 0000-0003-1014-9784 ; 0000-0002-3804-0740</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/9520397$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,780,784,27924,27925,54796</link.rule.ids></links><search><creatorcontrib>Xu, Xiaochao</creatorcontrib><creatorcontrib>Wang, Qian</creatorcontrib><creatorcontrib>Tian, Ji'ao</creatorcontrib><creatorcontrib>Yang, Lujia</creatorcontrib><creatorcontrib>Fang, Yanyan</creatorcontrib><creatorcontrib>Wang, Qiu</creatorcontrib><creatorcontrib>Zhao, Chun</creatorcontrib><creatorcontrib>Hu, Fangjing</creatorcontrib><creatorcontrib>Tu, Liangcheng</creatorcontrib><title>On the Air Buoyancy Effect in MEMS-Based Gravity Sensors for High Resolution Gravity Measurements</title><title>IEEE sensors journal</title><addtitle>JSEN</addtitle><description><![CDATA[In this paper, the air buoyancy effect on Micro-Electro-MechanicalSystem (MEMS)-based gravity sensors for high-resolution gravity measurements is investigated. The MEMS gravimeter is operated in an atmospheric environment without any vacuum chamber; thus significantly simplifying the design, implementation and maintenance, and reducing the cost of the instrument. It is experimentally observed that the measured acceleration signal shows a clear correlation with the air buoyancy, and consequently the air pressure. A detailed theoretical model of the air buoyant force acting on the MEMS gravity sensor is proposed, giving a gravity-air pressure coefficient of 501.5 <inline-formula> <tex-math notation="LaTeX">\mu </tex-math></inline-formula>Gal/hPa for the silicon springmass system. After removing the error introduced by the air buoyant force, the MEMS gravity sensor exhibits an ultra-low self-noise floor of 1 <inline-formula> <tex-math notation="LaTeX">\mu {\mathrm {Gal}}/\sqrt{\rm Hz} </tex-math></inline-formula>@1 Hz, as well as an excellent stability, with an Allan deviation of 3 <inline-formula> <tex-math notation="LaTeX">\mu </tex-math></inline-formula>Gal (40 s integration time). The sensor is capable of measuring the Earth tides in a 16-day span. This discovery identified one major error source in high-resolution MEMS gravity sensors operating in atmosphere, which could potentially be useful for the development of future MEMS-based gravimeters.]]></description><subject>Acceleration measurement</subject><subject>Accelerometers</subject><subject>air buoyancy</subject><subject>Buoyancy</subject><subject>Earth tides</subject><subject>Gravimeters</subject><subject>Gravity</subject><subject>Gravity measurement</subject><subject>gravity sensor</subject><subject>High resolution</subject><subject>high-stability</subject><subject>MEMS devices</subject><subject>Micromechanical devices</subject><subject>Sensors</subject><subject>Temperature measurement</subject><subject>Temperature sensors</subject><subject>Vacuum chambers</subject><issn>1530-437X</issn><issn>1558-1748</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2021</creationdate><recordtype>article</recordtype><recordid>eNo9kF1LwzAUhoMoOKc_QLwJeN2ZjyZpLjepm7I5cArehSw9dR1bO5NW6L-3ZWNX51w873sOD0L3lIwoJfrpbZW-jxhhdMQpkVKqCzSgQiQRVXFy2e-cRDFX39foJoQtIVQroQbILktcbwCPC48nTdXa0rU4zXNwNS5KvEgXq2hiA2R46u1fUbd4BWWofMB55fGs-NngDwjVrqmLqjwzC7Ch8bCHsg636Cq3uwB3pzlEXy_p5_Msmi-nr8_jeeSY5nX3m14LGudMOuK4yJSTTlMHViXxWlthicqEoo4xyCHRVsYZULHW2iqqXSL5ED0eew---m0g1GZbNb7sThomEi5jIhXtKHqknK9C8JCbgy_21reGEtObNL1J05s0J5Nd5uGYKQDgzGvBCNeK_wOY0W7x</recordid><startdate>20211015</startdate><enddate>20211015</enddate><creator>Xu, Xiaochao</creator><creator>Wang, Qian</creator><creator>Tian, Ji'ao</creator><creator>Yang, Lujia</creator><creator>Fang, Yanyan</creator><creator>Wang, Qiu</creator><creator>Zhao, Chun</creator><creator>Hu, Fangjing</creator><creator>Tu, Liangcheng</creator><general>IEEE</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>97E</scope><scope>RIA</scope><scope>RIE</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7U5</scope><scope>8FD</scope><scope>L7M</scope><orcidid>https://orcid.org/0000-0002-6324-872X</orcidid><orcidid>https://orcid.org/0000-0001-8400-433X</orcidid><orcidid>https://orcid.org/0000-0003-1014-9784</orcidid><orcidid>https://orcid.org/0000-0002-3804-0740</orcidid></search><sort><creationdate>20211015</creationdate><title>On the Air Buoyancy Effect in MEMS-Based Gravity Sensors for High Resolution Gravity Measurements</title><author>Xu, Xiaochao ; Wang, Qian ; Tian, Ji'ao ; Yang, Lujia ; Fang, Yanyan ; Wang, Qiu ; Zhao, Chun ; Hu, Fangjing ; Tu, Liangcheng</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c293t-439b514f26c0c35d7c6c91cea784b9a5a07d571c22efe89a64de15b99a719c863</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2021</creationdate><topic>Acceleration measurement</topic><topic>Accelerometers</topic><topic>air buoyancy</topic><topic>Buoyancy</topic><topic>Earth tides</topic><topic>Gravimeters</topic><topic>Gravity</topic><topic>Gravity measurement</topic><topic>gravity sensor</topic><topic>High resolution</topic><topic>high-stability</topic><topic>MEMS devices</topic><topic>Micromechanical devices</topic><topic>Sensors</topic><topic>Temperature measurement</topic><topic>Temperature sensors</topic><topic>Vacuum chambers</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Xu, Xiaochao</creatorcontrib><creatorcontrib>Wang, Qian</creatorcontrib><creatorcontrib>Tian, Ji'ao</creatorcontrib><creatorcontrib>Yang, Lujia</creatorcontrib><creatorcontrib>Fang, Yanyan</creatorcontrib><creatorcontrib>Wang, Qiu</creatorcontrib><creatorcontrib>Zhao, Chun</creatorcontrib><creatorcontrib>Hu, Fangjing</creatorcontrib><creatorcontrib>Tu, Liangcheng</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998–Present</collection><collection>IEEE Electronic Library Online</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>IEEE sensors journal</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Xu, Xiaochao</au><au>Wang, Qian</au><au>Tian, Ji'ao</au><au>Yang, Lujia</au><au>Fang, Yanyan</au><au>Wang, Qiu</au><au>Zhao, Chun</au><au>Hu, Fangjing</au><au>Tu, Liangcheng</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>On the Air Buoyancy Effect in MEMS-Based Gravity Sensors for High Resolution Gravity Measurements</atitle><jtitle>IEEE sensors journal</jtitle><stitle>JSEN</stitle><date>2021-10-15</date><risdate>2021</risdate><volume>21</volume><issue>20</issue><spage>22480</spage><epage>22488</epage><pages>22480-22488</pages><issn>1530-437X</issn><eissn>1558-1748</eissn><coden>ISJEAZ</coden><abstract><![CDATA[In this paper, the air buoyancy effect on Micro-Electro-MechanicalSystem (MEMS)-based gravity sensors for high-resolution gravity measurements is investigated. The MEMS gravimeter is operated in an atmospheric environment without any vacuum chamber; thus significantly simplifying the design, implementation and maintenance, and reducing the cost of the instrument. It is experimentally observed that the measured acceleration signal shows a clear correlation with the air buoyancy, and consequently the air pressure. A detailed theoretical model of the air buoyant force acting on the MEMS gravity sensor is proposed, giving a gravity-air pressure coefficient of 501.5 <inline-formula> <tex-math notation="LaTeX">\mu </tex-math></inline-formula>Gal/hPa for the silicon springmass system. After removing the error introduced by the air buoyant force, the MEMS gravity sensor exhibits an ultra-low self-noise floor of 1 <inline-formula> <tex-math notation="LaTeX">\mu {\mathrm {Gal}}/\sqrt{\rm Hz} </tex-math></inline-formula>@1 Hz, as well as an excellent stability, with an Allan deviation of 3 <inline-formula> <tex-math notation="LaTeX">\mu </tex-math></inline-formula>Gal (40 s integration time). The sensor is capable of measuring the Earth tides in a 16-day span. This discovery identified one major error source in high-resolution MEMS gravity sensors operating in atmosphere, which could potentially be useful for the development of future MEMS-based gravimeters.]]></abstract><cop>New York</cop><pub>IEEE</pub><doi>10.1109/JSEN.2021.3106667</doi><tpages>9</tpages><orcidid>https://orcid.org/0000-0002-6324-872X</orcidid><orcidid>https://orcid.org/0000-0001-8400-433X</orcidid><orcidid>https://orcid.org/0000-0003-1014-9784</orcidid><orcidid>https://orcid.org/0000-0002-3804-0740</orcidid></addata></record> |
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subjects | Acceleration measurement Accelerometers air buoyancy Buoyancy Earth tides Gravimeters Gravity Gravity measurement gravity sensor High resolution high-stability MEMS devices Micromechanical devices Sensors Temperature measurement Temperature sensors Vacuum chambers |
title | On the Air Buoyancy Effect in MEMS-Based Gravity Sensors for High Resolution Gravity Measurements |
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