Thermodynamic Study of Iridium(I) Complexes as a Basis for Chemical Gas-Phase Deposition Technology

Experimental data on the saturated vapor pressure and melting of dicarbonyl(hexafluoroacetylacetonato)iridium [Ir(CO) 2 (hfac)] were obtained. Thermodynamic characteristics of its melting and sublimation were calculated. A unified processing of p ‒ T dependences, the reduction of sublimation paramet...

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Bibliographic Details
Published in:Russian journal of general chemistry 2021-10, Vol.91 (10), p.1990-1998
Main Authors: Zherikova, K. V., Makarenko, A. M., Karakovskaya, K. I., Zelenina, L. N., Sysoev, S. V., Vikulova, E. S., Morozova, N. B.
Format: Article
Language:English
Subjects:
Analysis
Carbon monoxide
Chemistry
Chemistry and Materials Science
Chemistry/Food Science
Coatings
Deposition
Iridium
Precursors
Reagents
Sublimation
Thermal properties
Thermodynamic models
Thermodynamics
Vapor pressure
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Summary:Experimental data on the saturated vapor pressure and melting of dicarbonyl(hexafluoroacetylacetonato)iridium [Ir(CO) 2 (hfac)] were obtained. Thermodynamic characteristics of its melting and sublimation were calculated. A unified processing of p ‒ T dependences, the reduction of sublimation parameters to the standard temperature, and the thermodynamic modeling of the composition of condensed phases in the precursor‒gas‒ reagent system were carried out for three iridium(I) compounds: [Ir(CO) 2 (hfac)], [Ir(CO) 2 (acac)], and [Ir(cod)(hfac)] (acac – = acetylacetonate ion, cod = cyclooctadiene-1,3). The results form the basis for selection of a precursor and determination of the optimal deposition conditions for iridium(I)-based coatings.
ISSN:1070-3632
1608-3350
DOI:10.1134/S1070363221100108