A constant pressure flowmeter for extreme-high vacuum

We demonstrate operation of a constant-pressure flowmeter capable of generating and accurately measuring flows as low as \(2\times10^{-13}\) mol/s. Generation of such small flows is accomplished by using a small conductance element with \(C\approx 50\) nL/s. Accurate measurement then requires both l...

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Bibliographic Details
Published in:arXiv.org 2022-08
Main Authors: Eckel, S, Barker, D S, Fedchak, J, Newsome, E, Scherschligt, J, Vest, R
Format: Article
Language:English
Subjects:
Compressibility
Flow control
High vacuum
Hydraulic equipment
Outgassing
Uncertainty
Online Access:Get full text
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Summary:We demonstrate operation of a constant-pressure flowmeter capable of generating and accurately measuring flows as low as \(2\times10^{-13}\) mol/s. Generation of such small flows is accomplished by using a small conductance element with \(C\approx 50\) nL/s. Accurate measurement then requires both low outgassing materials (\(
ISSN:2331-8422
DOI:10.48550/arxiv.2111.05695