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Experimental Investigation on Mechanical Properties of TiAlN Thin Films Deposited by RF Magnetron Sputtering

The mechanical properties of TiAlN deposited on the steel are explained in this study. Thin films are deposited by RF magnetron sputtering on the steel substrates to improve the wear resistance and hardness of the samples. Due to their improved microstructure and nanograins, the nanofilms have impro...

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Bibliographic Details
Published in:Journal of nanomaterials 2021-11, Vol.2021, p.1-7
Main Authors: Natrayan, L., Balaji, S., Bharathiraja, G., Kaliappan, S., Veeman, Dhinakaran, Mammo, Wubishet Degife
Format: Article
Language:English
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Summary:The mechanical properties of TiAlN deposited on the steel are explained in this study. Thin films are deposited by RF magnetron sputtering on the steel substrates to improve the wear resistance and hardness of the samples. Due to their improved microstructure and nanograins, the nanofilms have improved the mechanical properties of the steel substrate surface. The thin film deposited has improved the wear resistance by 80% and has improved the hardness by 95%. The deposited thin films are tested for hardness by nanoindentation and wear test by the pin-on-disk test. SEM has tested films for their microstructure and adhesion by nanoscratch test.
ISSN:1687-4110
1687-4129
DOI:10.1155/2021/5943486