Determination of optical constants of silicon Cz-Si and CVD using reflection spectra from the surface

A new version of the method for determining of optical constants based on the analysis of the reflection spectra and transmission spectra from the surface of a single crystal and from the reflection from the surface of a wedge-shaped plate presents in this paper. These techniques are used to determi...

Full description

Saved in:
Bibliographic Details
Main Authors: Kotlikov, Evgeniy, Lavrovskaya, Nataliya, Novikova, Yuliana, Tereshchenko, Georgy
Format: Conference Proceeding
Language:English
Subjects:
Optical components
Refractivity
Silicon
Silicon oxides
Single crystals
Spectra
Surface layers
Wedge shaped plates
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:A new version of the method for determining of optical constants based on the analysis of the reflection spectra and transmission spectra from the surface of a single crystal and from the reflection from the surface of a wedge-shaped plate presents in this paper. These techniques are used to determine the optical constants of Cz-Si and CVD silicon. The results of determining the refractive index from the reflection from the surface are less than the tabulated ones by 0.025, which, according to our assumption, indicates the presence of a thin surface layer of silicon oxides. This method allowed us to improve the quality of manufacturing antireflection and beam-splitting coatings on silicon optical elements.
ISSN:0094-243X
1551-7616
DOI:10.1063/5.0072089