Comparison of surface and subsurface damage of mosaic single-crystal diamond substrate processed by mechanical and plasma-assisted polishing

The surface and subsurface damage of a mosaic single-crystal diamond (SCD) (100) substrate processed by mechanical polishing (MP) and plasma-assisted polishing (PAP) were studied. Scanning white-light interferometer (SWLI) (84-μm square) observation for different local positions showed that the surf...

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Bibliographic Details
Published in:Diamond and related materials 2021-11, Vol.119, p.108555, Article 108555
Main Authors: Liu, Nian, Yamada, Hideaki, Yoshitaka, Naoya, Sugimoto, Kentaro, Sun, Rongyan, Kawai, Kentaro, Arima, Kenta, Yamamura, Kazuya
Format: Article
Language:English
Subjects:
Cathodoluminescence
Damage
Diamonds
Luminescence
Mechanical polishing
Mosaic single-crystal diamond
Mosaics
Plasma-assisted polishing
Position measurement
Raman spectroscopy
Residual stress
Scanning
Single crystals
Substrates
Subsurface damage
White light
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Summary:The surface and subsurface damage of a mosaic single-crystal diamond (SCD) (100) substrate processed by mechanical polishing (MP) and plasma-assisted polishing (PAP) were studied. Scanning white-light interferometer (SWLI) (84-μm square) observation for different local positions showed that the surface damage such as scratches and deep pits were observed on the mosaic SCD substrate after MP, while such damage was completely removed after PAP. Scanning cathodoluminescence (CL) measurement of band-A emission for different local positions showed that scratches with high luminescence intensity attributed to subsurface damage were observed on the mosaic SCD substrate after MP, while such specific luminescence was not observed after PAP. Micro-Raman spectroscopy measurement showed that peak position shift of diamond Raman lines attributed to residual stress and full width at half maximum (FWHM) broadening attributed to destruction of the crystalline structure were observed on the mosaic SCD substrate after MP, while such a peak position shift and FWHM broadening were not observed after PAP. [Display omitted] •Surface and subsurface damage of a mosaic single-crystal diamond (SCD) (100) substrate processed by MP and PAP were compared.•Scratches were observed after MP by scanning CL, while they were not observed after PAP.•Peak position shift and FWHM broadening were observed after MP by Raman spectroscopy, while they were not observed after PAP.
ISSN:0925-9635
1879-0062
DOI:10.1016/j.diamond.2021.108555