Chemical vapor deposition of CoFe2O4 micropillar arrays with enhanced magnetic properties

•Structured CoFe2O4 spinel thin films deposited by CVD.•Conformal CoFe2O4 spinel layer on textured surfaces.•The structural influence of CFO thin films on anisotropic magnetisation properties.•Micropillar fabrication for magnetoelectric applications. [Display omitted] Single-step thermal chemical va...

Full description

Saved in:
Bibliographic Details
Published in:Journal of alloys and compounds 2022-01, Vol.890, p.161758, Article 161758
Main Authors: Aspe, B., Malyeyev, A., Vakilinejad, A., Menguelti, K., Michels, A., Bahlawane, N.
Format: Article
Language:English
Subjects:
Acetylacetone
Arrays
CFO
Chemical vapor deposition
Cobalt ferrites
Coercivity
CVD
Ferromagnetic
Magnetic properties
Magnetic saturation
Magnetization
Micropillar
Precursors
Thin films
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:•Structured CoFe2O4 spinel thin films deposited by CVD.•Conformal CoFe2O4 spinel layer on textured surfaces.•The structural influence of CFO thin films on anisotropic magnetisation properties.•Micropillar fabrication for magnetoelectric applications. [Display omitted] Single-step thermal chemical vapor deposition was optimized at 400 °C for the growth of CoFe2O4 spinel thin films starting from the corresponding metal acetylacetonate precursors. Enhanced magnetization was observed for conditions leading to a columnar growth with a preferred (100) orientation. The implemented liquid precursor delivery secured a reliable films’ composition control and a straightforward dosage of acetylacetone, as a molecular growth inhibitor, to enhance the film conformality on structured surfaces. The optimized conditions enabled an efficient micro-pore filling, and the fabricated ordered micropillar arrays feature a coercivity of 1.8 kOe and a saturation magnetization of 350 emu/cm3. The implemented state-of-the-art up-scalable microfabrication technology, the reasonable thermal budget and the resulting high magnetic performance pave the way towards the development of innovative magnetoelectric devices.
ISSN:0925-8388
1873-4669
DOI:10.1016/j.jallcom.2021.161758