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Control of Chemical Structure and Lithium-ion Conductivity of Amorphous Lithium Phosphate Thin Film Deposited by Pulsed Laser Deposition

Effects of target-substrate (TS) distance during pulsed laser deposition process on the chemical structure and lithium-ion conductivity of amorphous lithium phosphate (LPO) thin films are investigated. The shorter TS distance results in lower Li concentration, longer phosphate chain, and higher ioni...

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Bibliographic Details
Published in:Chemistry letters 2022-01, Vol.51 (1), p.34-37
Main Authors: Yamamoto, Takayuki, Takeuchi, Ayumi, Ohnishi, Junji, Yasuno, Satoshi, Motoyama, Munekazu, Iriyama, Yasutoshi
Format: Article
Language:English
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Summary:Effects of target-substrate (TS) distance during pulsed laser deposition process on the chemical structure and lithium-ion conductivity of amorphous lithium phosphate (LPO) thin films are investigated. The shorter TS distance results in lower Li concentration, longer phosphate chain, and higher ionic conductivity. The ionic conductivity of 2.7 × 10−7 S/cm is obtained at 25 °C in the LPO thin film with short TS distance.
ISSN:0366-7022
1348-0715
DOI:10.1246/cl.210529