Electron-Beam Synthesis of Dielectric Coatings Using Forevacuum Plasma Electron Sources (Review)

This is a review of current developments in the field of ion-plasma and beam methods of synthesis of protective and functional dielectric coatings. We give rationales for attractiveness and prospects of creating such coatings by electron-beam heating and following evaporation of dielectric targets....

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Bibliographic Details
Published in:Coatings (Basel) 2022-01, Vol.12 (1), p.82
Main Authors: Yushkov, Yury G., Oks, Efim M., Tyunkov, Andrey V., Zolotukhin, Denis B.
Format: Article
Language:English
Subjects:
Aluminum oxide
Boron
Ceramic glazes
Coatings
Corrosion
Dielectric properties
Dielectrics
Electron beams
Electron sources
Evaporation
Gas turbine engines
Gases
Nuclear energy
Plasma
Protective coatings
Silicon carbide
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Summary:This is a review of current developments in the field of ion-plasma and beam methods of synthesis of protective and functional dielectric coatings. We give rationales for attractiveness and prospects of creating such coatings by electron-beam heating and following evaporation of dielectric targets. Forevacuum plasma electron sources, operating at elevated pressure values from units to hundreds of pascals, make it possible to exert the direct action of an electron beam on low-conductive materials. Electron-beam evaporation of aluminum oxide, boron, and silicon carbide targets is used to exemplify the particular features of electron-beam synthesis of such coatings and their parameters and characteristics.
ISSN:2079-6412
2079-6412
DOI:10.3390/coatings12010082