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Characterization of high quality, monolayer WS2 domains via chemical vapor deposition technique

WS 2 flakes have been grown successfully on SiO 2 substrate via chemical vapor deposition method by reduction and sulfurization of WO 3 using Ar/H 2 gas and sulfur evaporated from solid sulfur powder. The prepared samples were characterized by optical microscopy, atomic force microscopy, scanning el...

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Published in:Applied physics. A, Materials science & processing Materials science & processing, 2022-02, Vol.128 (2), Article 139
Main Authors: Asgary, Somayeh, Ramezani, Amir Hoshang, Ebrahimi Nejad, Zhaleh
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description WS 2 flakes have been grown successfully on SiO 2 substrate via chemical vapor deposition method by reduction and sulfurization of WO 3 using Ar/H 2 gas and sulfur evaporated from solid sulfur powder. The prepared samples were characterized by optical microscopy, atomic force microscopy, scanning electron microscopy, Raman spectra and photoluminescence (PL). WS 2 monolayers are obtained by extending the growth time. The perfect triangular single-crystalline WS 2 flakes with an average length of more than 35 µm were achieved. The sharp PL peak ( ∼  1.98 eV) and two distinct Raman peaks ( E 2 g and A 1 g ) with a ∼  71.5 cm −1 peak split indicating that relatively high quality WS 2 crystals with a regular triangle shape can be synthesized. Higher growth time shows larger triangular-shaped of WS 2 .
doi_str_mv 10.1007/s00339-022-05270-0
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subjects Applied physics
Atomic force microscopy
Characterization and Evaluation of Materials
Chemical vapor deposition
Condensed Matter Physics
Flakes
Machines
Manufacturing
Materials science
Microscopes
Microscopy
Monolayers
Nanotechnology
Optical and Electronic Materials
Optical microscopy
Photoluminescence
Physics
Physics and Astronomy
Processes
Raman spectra
Silicon dioxide
Single crystals
Substrates
Sulfur
Sulfurization
Surfaces and Interfaces
Thin Films
title Characterization of high quality, monolayer WS2 domains via chemical vapor deposition technique
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