Experimental evaluation of the temperature of inductively coupled water vapor plasma using the Fourier law

The paper presents the results of experimental evaluation of the temperature of inductively coupled water vapor plasma using the Fourier law. The power of the inductive discharge is in the range from 1280 to 2800 W at a frequency of 40 MHz and a pressure from 1 to 5 mbar. The temperature values are...

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Bibliographic Details
Published in:Journal of physics. Conference series 2020-12, Vol.1675 (1), p.12107
Main Authors: Savenko, R A, Medvedev, R N
Format: Article
Language:English
Subjects:
Fourier law
Physics
Plasma
Plasma temperature
Temperature
Water vapor
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Summary:The paper presents the results of experimental evaluation of the temperature of inductively coupled water vapor plasma using the Fourier law. The power of the inductive discharge is in the range from 1280 to 2800 W at a frequency of 40 MHz and a pressure from 1 to 5 mbar. The temperature values are found to be from 2.4 to 2.8 kK. Plasma temperature evaluation is verified on the Balmer hydrogen series using relative intensities method. It is shown that in this pressure range, the plasma is not in equilibrium and at a power of 1650 W, the resulting temperatures Tαβ, Tαγ, and Tβγ are 3500 K, 2200 K, and 1200 K, respectively, while the temperature obtained by the Fourier method for the same power is 2500 K.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/1675/1/012107