Design and characteristic analysis of multi-degree-of-freedom ultrasonic motor based on spherical stator

The multidimensional motion ultrasonic motor with a single spherical stator is studied in this paper. It has the characteristics of miniaturization and can be used in precision motion applications. By bonding six identical pieces of piezoelectric ceramic onto the stator and applying the voltage sign...

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Bibliographic Details
Published in:Review of scientific instruments 2022-02, Vol.93 (2), p.025004-025004
Main Authors: Li, Zheng, Guo, Zhanyu, Han, Haitao, Su, Zhirong, Sun, Hexu
Format: Article
Language:English
Subjects:
Ceramic bonding
Deformation effects
Degrees of freedom
Electric potential
Equipment Design
Mechanical properties
Miniaturization
Motor stators
Piezoelectric ceramics
Piezoelectricity
Rotating spheres
Rotation
Scientific apparatus & instruments
Stators
Transient response
Ultrasonics
Vibration
Vibration mode
Voltage
Yaw
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Summary:The multidimensional motion ultrasonic motor with a single spherical stator is studied in this paper. It has the characteristics of miniaturization and can be used in precision motion applications. By bonding six identical pieces of piezoelectric ceramic onto the stator and applying the voltage signal of high frequency, the deformation of the inverse piezoelectric effect is used to excite the stator yaw vibration mode. The orthogonal superposition of the modes of the spherical stator on the driving foot produces elliptical trajectory around X, Y, and Z directions by different excitation methods. According to the yaw vibration mode of the spherical stator, 12 driving feet are designed to drive the rotation of the spherical rotor. The structure and mechanical characteristics of the motor are simulated by using simulation software, and the transient response of the stator driving foot was obtained, which proved its feasibility. Finally, the output performance of the motor in actual operation is given through experiments, which provides a new reference scheme in the field of precise multi-degree-of-freedom motion. At a voltage of 100 V and a frequency of 26.7 kHz, the prototype has a no-load speed of 73, 70, and 114 rpm around X, Y, and Z axes, respectively.
ISSN:0034-6748
1089-7623
DOI:10.1063/5.0074049