Simultaneous Dimensional and Analytical Characterization of Ordered Nanostructures

• Published in: Small (Weinheim an der Bergstrasse, Germany) Germany), 2022-02, Vol.18 (6), p.e2105776-n/a
• Main Authors: Hönicke, Philipp, Kayser, Yves, Nikolaev, Konstantin V., Soltwisch, Victor, Scheerder, Jeroen E., Fleischmann, Claudia, Siefke, Thomas, Andrle, Anna, Gwalt, Grzegorz, Siewert, Frank, Davis, Jeffrey, Huth, Martin, Veloso, Anabela, Loo, Roger, Skroblin, Dieter, Steinert, Michael, Undisz, Andreas, Rettenmayr, Markus, Beckhoff, Burkhard
• Format: Article
• Language: English
• Subjects: Dimensional analysis; dimensional and compositional analysis; Fluorescence; grazing exit X‐ray fluorescence; machine learning; Nanostructure; nanostructure characterization; Nanostructures - chemistry; Nanotechnology; Nondestructive testing; Research facilities
• ISSN: 1613-6810; 1613-6829
• DOI: 10.1002/smll.202105776

The spatial and compositional complexity of 3D structures employed in today's nanotechnologies has developed to a level at which the requirements for process development and control can no longer fully be met by existing metrology techniques. For instance, buried parts in stratified nanostructures, which are often crucial for device functionality, can only be probed in a destructive manner in few locations as many existing nondestructive techniques only probe the objects surfaces. Here, it is demonstrated that grazing exit X‐ray fluorescence can simultaneously characterize an ensemble of regularly ordered nanostructures simultaneously with respect to their dimensional properties and their elemental composition. This technique is nondestructive and compatible to typically sized test fields, allowing the same array of structures to be studied by other techniques. For crucial parameters, the technique provides sub‐nm discrimination capabilities and it does not require access‐limited large‐scale research facilities as it is compatible to laboratory‐scale instrumentation. Ordered arrays of complex 3D nanostructures are being characterized with respect to their dimensional and analytical properties employing nondestructive X‐ray fluorescence analysis in grazing exit geometry. For crucial parameters, the technique provides sub‐nm discrimination capabilities and it is compatible to typically sized test fields.