Y-Based Multilayer Mirrors for the Spectral Range of 8–12 nm

Ru/Y multilayer mirrors for a wavelength range of 8–12 nm are studied. A positive effect of the use of B 4 C barrier layers on the reflectance is shown. A record reflectance of 56% at a wavelength of 11.4 nm was achieved on a Y/B 4 C/Ru mirror.

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Bibliographic Details
Published in:Bulletin of the Lebedev Physics Institute 2021-12, Vol.48 (12), p.406-410
Main Authors: Polkovnikov, V. N., Shaposhnikov, R. A., Chkhalo, N. I., Salashchenko, N. N., Djuzhev, N. A., Pudonin, F. A., Demin, G. D.
Format: Article
Language:English
Subjects:
Barrier layers
Boron carbide
Multilayers
Physics
Physics and Astronomy
Reflectance
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Description
Summary:Ru/Y multilayer mirrors for a wavelength range of 8–12 nm are studied. A positive effect of the use of B 4 C barrier layers on the reflectance is shown. A record reflectance of 56% at a wavelength of 11.4 nm was achieved on a Y/B 4 C/Ru mirror.
ISSN:1068-3356
1934-838X
DOI:10.3103/S1068335621120101