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Atom Probe Tomography Data Reconstruction with the Correction on Material Density

Data collected with an atom probe tomograph allow to reconstruct 3D atom maps of chemical element atoms with high accuracy. Due to the permanent improvement of AP installations, new 3D reconstruction procedures are required. This work proposes an improved approach for atom probe data reconstruction...

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Bibliographic Details
Published in:Physics of atomic nuclei 2021-12, Vol.84 (11), p.1836-1842
Main Authors: Lukyanchuk, A. A., Aleev, A. A., Shutov, A. S., Raznitsyn, O. A., Kirillov, C. E., Rogozhkin, S. V.
Format: Article
Language:English
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Summary:Data collected with an atom probe tomograph allow to reconstruct 3D atom maps of chemical element atoms with high accuracy. Due to the permanent improvement of AP installations, new 3D reconstruction procedures are required. This work proposes an improved approach for atom probe data reconstruction which uses dynamic parameters and a calibration based on the material density.
ISSN:1063-7788
1562-692X
DOI:10.1134/S1063778821120048