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Atom Probe Tomography Data Reconstruction with the Correction on Material Density
Data collected with an atom probe tomograph allow to reconstruct 3D atom maps of chemical element atoms with high accuracy. Due to the permanent improvement of AP installations, new 3D reconstruction procedures are required. This work proposes an improved approach for atom probe data reconstruction...
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Published in: | Physics of atomic nuclei 2021-12, Vol.84 (11), p.1836-1842 |
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Main Authors: | , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites |
Online Access: | Get full text |
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Summary: | Data collected with an atom probe tomograph allow to reconstruct 3D atom maps of chemical element atoms with high accuracy. Due to the permanent improvement of AP installations, new 3D reconstruction procedures are required. This work proposes an improved approach for atom probe data reconstruction which uses dynamic parameters and a calibration based on the material density. |
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ISSN: | 1063-7788 1562-692X |
DOI: | 10.1134/S1063778821120048 |