Dielectric Coating Deposition Regimes during Electron-Beam Evaporation of Ceramics in the Fore-Vacuum Pressure Range

We present experimental results on the deposition of dielectric coatings on metal surfaces by electron-beam evaporation of alumina ceramics in nitrogen and oxygen gas medium at the pressures of 5–30 Pa. The feasibility of implementing this approach is associated with the use of unique fore-vacuum pl...

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Bibliographic Details
Published in:Coatings (Basel) 2022-02, Vol.12 (2), p.130
Main Authors: Yushkov, Yury G., Oks, Efim M., Tyunkov, Andrey V., Zolotukhin, Denis B.
Format: Article
Language:English
Subjects:
Aluminum oxide
Breakdowns
Ceramic coatings
Ceramic glazes
Ceramics
Deposition
Electron beams
Electron sources
Evaporation rate
Integrated circuits
Lasers
Metal surfaces
Plasma
Protective coatings
Radiation
Wear resistance
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Summary:We present experimental results on the deposition of dielectric coatings on metal surfaces by electron-beam evaporation of alumina ceramics in nitrogen and oxygen gas medium at the pressures of 5–30 Pa. The feasibility of implementing this approach is associated with the use of unique fore-vacuum plasma electron sources. The effect of electron beam power on the rates of ceramic target evaporation and, consequently, on the coating deposition rate is investigated. The structure, electrical-insulating and mechanical (wear resistance, adhesion) properties of the deposited coatings is investigated. We also show the possibility of using coatings for electrical insulating of wires and monolithic integrated circuits.
ISSN:2079-6412
2079-6412
DOI:10.3390/coatings12020130