The Vibration and Measurement of Driving Mode of the Two-Stage Decoupled Micro-Machined Gyroscope

This paper introduces the working principle of the two-stage decoupled micro-machined gyroscope, and establishes the vibration equation of the driving mode. By solving the differential equation, the analytical solution and the amplitude-frequency characteristics of the driving mode are obtained. By...

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Bibliographic Details
Published in:International journal on smart sensing and intelligent systems 2013-01, Vol.6 (4), p.1599-1616
Main Authors: Fenglin, Yao, Shiqiao, Gao, Jie, Zhao, Haipeng, Liu, Shaohua, Niu, Lei, Jin
Format: Article
Language:English
Subjects:
Damping
decoupled
Differential equations
driving mode
Exact solutions
Gyroscopes
High speed photography
Image processing
measurement
micro-machined gyroscope
Micromachining
Resonant frequencies
vibration
Vibration measurement
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Summary:This paper introduces the working principle of the two-stage decoupled micro-machined gyroscope, and establishes the vibration equation of the driving mode. By solving the differential equation, the analytical solution and the amplitude-frequency characteristics of the driving mode are obtained. By the visual measurement based on high-speed photography and the post image processing, it measures the natural frequency of the driving mode of the micro-machined gyroscope. And it measures the damping coefficient in time domain and frequency domain respectively using this method. The comparison to the theoretical solution proves that the method is effective and accurate; it will help the study for the micro-machined gyroscope vibration and provides a new way to measure MEMS.
ISSN:1178-5608
1178-5608
DOI:10.21307/ijssis-2017-606