Fabrication of heater‐integrated MEMS tactile sensor for evaluation of warm and cold sensation by touching glass

The paper addresses fabrication and characterization of a MEMS tactile sensor sensitive to force and temperature with an on‐chip heater and a contact part of thermally conductive elastomer. The temperature response of this sensor due to heat transfer when it was in contact with the glass plate was m...

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Bibliographic Details
Published in:Electrical engineering in Japan 2022-03, Vol.215 (1), p.n/a
Main Authors: Onda, Naotaka, Kozuka, Takaaki, Abe, Takashi, Isshiki, Masanobu, Tomeno, Satoru, Sohgawa, Masayuki
Format: Article
Language:English
Subjects:
elastomer
Elastomers
Glass plates
on‐chip heater integration
Sensors
Surface treatment
tactile sensor
Tactile sensors (robotics)
temperature sensor
warm‐cool evaluation
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Summary:The paper addresses fabrication and characterization of a MEMS tactile sensor sensitive to force and temperature with an on‐chip heater and a contact part of thermally conductive elastomer. The temperature response of this sensor due to heat transfer when it was in contact with the glass plate was measured. As a result, it is demonstrated that fabricated sensor can detect thermally difference due to differences in the surface treatment of the glass.
ISSN:0424-7760
1520-6416
DOI:10.1002/eej.23370