Evaluation of Sputtered Mo–Cu–Cr–N Coatings Prepared at Different N2 Gas Flow Rates Using a Multicomponent Single-Alloy Target

With the growth of the automobile, machinery, and aerospace industries, demand for high-performance surface coatings having multifunctional characteristics for use in mechanical parts is increasing. In this study, ternary/quaternary Mo–Cu–Cr–(N) nanocomposite coatings were deposited at different N2...

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Bibliographic Details
Published in:Coatings (Basel) 2022-03, Vol.12 (3), p.371
Main Authors: Kim, Soobyn, An, Ki Won, Yoon, Hae Won, Park, Hyun Jun, Moon, Kyoung Il, Lee, Caroline Sunyong
Format: Article
Language:English
Subjects:
Aerospace industry
Chromium
Copper
Corrosion resistance
Direct current
Flow velocity
Friction
Gas flow
Magnetron sputtering
Mechanical properties
Metal nitrides
Microstructure
Molybdenum
Nanocomposites
Nitrogen
Plasma sintering
Process controls
Protective coatings
Scanning electron microscopy
Steel alloys
Transition metals
Tribology
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Summary:With the growth of the automobile, machinery, and aerospace industries, demand for high-performance surface coatings having multifunctional characteristics for use in mechanical parts is increasing. In this study, ternary/quaternary Mo–Cu–Cr–(N) nanocomposite coatings were deposited at different N2 gas flow rates using direct current magnetron sputtering from a multicomponent single-alloy target. The use of a single-alloy target simplifies the deposition process and improves the coating uniformity. The influence of the nitrogen content was investigated regarding the microstructural, mechanical, and tribological properties, and corrosion resistance of these coatings. The Mo–Cu–Cr–N coating containing 30.5 at.% nitrogen showed a nanocomposite structure comprising transition metal nitride phases (Mo–N/Cr–N) having high mechanical properties and corrosion resistance, while retaining the excellent tribological properties of ternary Mo–Cu–N coatings.
ISSN:2079-6412
2079-6412
DOI:10.3390/coatings12030371