Design and optimization of MEMS heart sound sensor based on bionic structure

•Design of MEMS heart sound sensor based on bionics.•An acoustic packaging method of bionic MEMS heart sound sensor based on acoustic impedance matching.•A bionic MEMS heart sound sensor with high sensitivity, wide working bandwidth and linearity. [Display omitted] Based on the sound pickup mechanis...

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Bibliographic Details
Published in:Sensors and actuators. A. Physical. 2022-01, Vol.333, p.113188, Article 113188
Main Authors: Cui, Jiangong, Li, Yirui, Yang, Yuhua, Shi, Pengcheng, Wang, Bo, Wang, Shuotong, Zhang, Guojun, Zhang, Wendong
Format: Article
Language:English
Subjects:
Background noise
Bionic
Bionics
Data analysis
Design optimization
Finite element method
Heart sound
MEMS
Sensitivity
Sensitivity analysis
Sensor
Sensors
Signal processing
Signal to noise ratio
Sound
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Summary:•Design of MEMS heart sound sensor based on bionics.•An acoustic packaging method of bionic MEMS heart sound sensor based on acoustic impedance matching.•A bionic MEMS heart sound sensor with high sensitivity, wide working bandwidth and linearity. [Display omitted] Based on the sound pickup mechanism of the three-dimensional ciliary bundle structure of human ear hair cells, this paper proposed a bionic MEMS heart sound sensor. First, the acoustic sensing principle of the bionic microstructure is analyzed and optimized by theoretical analysis and finite element simulation methods. Then the prepared sensor was acoustically encapsulated and experimentally tested. Finally, the dynamic periodic characteristics of the measured heart sound signal were obtained through data analysis, and the validity of the measured heart sound signal was verified. The results show that the optimized bionic MEMS heart sound sensor features high sensitivity, wide working bandwidth, good low frequency characteristics and small size, and can effectively suppress the interference of environmental noise on the sensor. The sensitivity of the sensor reaches − 189.5 dB@500 Hz, the working bandwidth is 10–800 Hz, and the signal-to-noise ratio is 29.08 dB. The sensor can be applied to the field of heart sound auscultation, and is of great significance for the effective acquisition of heart sound signals and the non-destructive diagnosis of cardiovascular diseases.
ISSN:0924-4247
1873-3069
DOI:10.1016/j.sna.2021.113188