Obtaining and Studying Films of Tungsten, Titanium and Their Oxides

The initial polycrystalline films of tungsten and titanium, whose surface has predominantly ultrananodispersed morphology and a thickness of 50 to 100 nm, are obtained by magnetron sputtering on conductive fluorinated tin oxide (FTO) films, which were deposited on glass substrates. At the next stage...

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Bibliographic Details
Published in:Glass physics and chemistry 2022-02, Vol.48 (1), p.61-68
Main Authors: Tomaev, V. V., Sokhovich, E. V., Myakin, S. V., Polishchuk, V. A., Semenova, A. A.
Format: Article
Language:English
Subjects:
Ceramics
Characterization and Evaluation of Materials
Chemistry and Materials Science
Composites
Electrochromism
Glass
Glass substrates
Magnetron sputtering
Materials Science
Morphology
Muffle furnaces
Natural Materials
Optical properties
Physical Chemistry
Tin oxides
Titanium
Titanium dioxide
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Summary:The initial polycrystalline films of tungsten and titanium, whose surface has predominantly ultrananodispersed morphology and a thickness of 50 to 100 nm, are obtained by magnetron sputtering on conductive fluorinated tin oxide (FTO) films, which were deposited on glass substrates. At the next stage, the resulting films of tungsten and titanium are thermally oxidized in a programmable muffle furnace in an air atmosphere. The morphology, structural, and the optical properties of both the initial tungsten and titanium films and their oxides are studied. Some preliminary results are presented and the prospects for using the obtained tungsten oxide (WO 3 ) and titanium dioxide (TiO 2 ) films as electrochromic, photochromic and sensor materials are discussed.
ISSN:1087-6596
1608-313X
DOI:10.1134/S1087659622010151