Two dimensional Zirconium diselenide based humidity sensor for flexible electronics

• Published in: Sensors and actuators. B, Chemical Chemical, 2022-05, Vol.358, p.131507, Article 131507
• Main Authors: Shaukat, Rayyan Ali, Khan, Muhammad Umair, Saqib, Qazi Muhammad, Chougale, Mahesh Y., Kim, Jungmin, Bermak, Amine, Bae, Jinho
• Format: Article
• Language: English
• Subjects: 2D material; Flakes; Flexible components; Humidity; Humidity sensor; Relative humidity; Screen printing; Sensitivity; Sensors; Spin coating; Spraying; Transient response; Transition metal compounds; Transition metal dichalcogenides; Two dimensional materials; Wet grinding; Zirconium; ZrSe2
• ISSN: 0925-4005; 1873-3077
• DOI: 10.1016/j.snb.2022.131507

Transition metal dichalcogenides (TMDCs), a class of two-dimensional (2D) materials with layered structures, have recently gained a lot of attention for highly sensitive humidity sensing applications. Hence, for the first time, it proposes a highly sensitive and fast humidity sensor based on the 2D Zirconium Diselenide (ZrSe2) material with unique humidity sensing performance via printed technologies. The spin coating technique was used to deposit the 2D ZrSe2 flakes onto the inter-digital electrodes (IDEs). Herein, the bulk ZrSe2 powder was exfoliated into the 2D flakes via wet grinding. The proposed sensor shows a high sensitivity of 68 kΩ / %RH (where RH is relative humidity) with a wide detection range of (15–80%) RH having good linearity and stability over 360 min. The sensor showed a transient response of 1 s and 2 s for impedance while 3 s and 6 s for capacitance. Hence, the fabricated sensor can be exhibited an ultra-high sensitivity and quick response in various applications: contactless humidity sensing, water spraying test, and skin humidity test. From these exceptional performances, the proposed sensor can be applied in multiple humidity sensing applications. •This paper proposes a highly sensitive and fast ZrSe2 based humidity sensor through printed technologies.•The proposed humidity sensor exhibits a fast transient response of 1 s and 2 s, and good stability for 360 min.•It has a highly linear relative humidity range of 15 – 80% RH and has been applied in various humidity sensing applications.