High performance of broadband anti-reflection film by glancing angle deposition

This study reports that SiO 2 was selected to fabricate broadband anti-reflection (AR) films on fused silica substrates by using glancing angle deposition and substrate rotation. Through accurate control of the graded index of the SiO 2 layer, the average residual reflectance of the graded broadband...

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Bibliographic Details
Published in:Optical materials express 2022-06, Vol.12 (6), p.2226
Main Authors: Feng, Cao, Zhang, Weili, Wang, Jianguo, Zhao, Yuanan, Yi, Kui, Shao, Jianda
Format: Article
Language:English
Subjects:
Angle of reflection
Antireflection coatings
Broadband
Deposition
Fused silica
Silicon dioxide
Substrates
Yield point
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Summary:This study reports that SiO 2 was selected to fabricate broadband anti-reflection (AR) films on fused silica substrates by using glancing angle deposition and substrate rotation. Through accurate control of the graded index of the SiO 2 layer, the average residual reflectance of the graded broadband AR film can achieve an average value of 0.59% across a spectral range of 400-1800nm. By comparing the performance, the broadband anti-reflection film with substrate speed has higher stability compared with the broadband anti-reflection film without substrate speed and a higher damage threshold than the traditional anti-reflection film.
ISSN:2159-3930
2159-3930
DOI:10.1364/OME.459950