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Microstructure and mechanical properties of VAlN/Si3N4 nano-multilayer coatings
VAlN coating is of particular interest for dry cutting applications owing to its low-friction and excellent abrasiveness. Nano-multilayer structure is designed to tailor the properties of VAlN coating. In this work, a series of VAlN/Si 3 N 4 nano-multilayer coatings with varied Si 3 N 4 layer thickn...
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Published in: | Journal of Central South University 2022-05, Vol.29 (5), p.1403-1411 |
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Main Authors: | , , , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | VAlN coating is of particular interest for dry cutting applications owing to its low-friction and excellent abrasiveness. Nano-multilayer structure is designed to tailor the properties of VAlN coating. In this work, a series of VAlN/Si
3
N
4
nano-multilayer coatings with varied Si
3
N
4
layer thicknesses were prepared by reactive sputtering method. The microstructure and mechanical properties of the coatings were both investigated. It is revealed that Si
3
N
4
with a shallow thickness (∼0.4 nm) was crystallized and grown coherently with VAlN, showing a remarkable increase in hardness compared to VAlN monolayer coating. The hardness of coherently VAlN/Si
3
N
4
nano-multilayer coatings reached to 48.7 GPa. With further increase of Si
3
N
4
layer thickness, the coherent growth of nano-multilayers was terminated, showing amorphous structure formed in nano-multilayers and the hardness was declined. On the other hand, when Si
3
N
4
layer thickness was 0.4 nm, the friction coefficient of VAlN/Si
3
N
4
nano-multilayer coating was almost equal to that of VAlN monolayer coating, which was attributed to the crystallization of Si
3
N
4
and the produced coherent interfaces between VAlN and Si
3
N
4
for the hardening effect of nano-multilayer coatings. Upon further increase of Si
3
N
4
layer thickness, pronounced improvement of friction coefficient in VAlN/Si
3
N
4
nano-multilayer coating was observed. |
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ISSN: | 2095-2899 2227-5223 |
DOI: | 10.1007/s11771-022-5005-x |